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Automatic Spin Cleaner Product List

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Automatic spin cleaning device

Automatic spin cleaning device equipped with a clean unit.

Cassette-type automatic device equipped with a clean unit that allows you to select option contents (the photo shows scrubbing cleaning + UV cleaning + hot plate) =============================================== <Specifications> Work size…Φ2 inches to Φ8 inches Transport…Atmospheric 3-axis clean robot Clean unit…HEPA filter Cleaning…Brush, MS standard equipment Options…High-pressure jet nozzle, UV, excimer, hot plate, etc. Utilities…Power supply, compressed air, nitrogen, pure water, exhaust, waste liquid, others

  • Other semiconductor manufacturing equipment

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